发明名称 PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS AND MOBILE BODY
摘要 PROBLEM TO BE SOLVED: To provide a physical quantity sensor which achieves reduction in size and cost and provide an electronic apparatus and a mobile body comprising the physical quantity sensor.SOLUTION: A physical quantity sensor according to the present invention comprises a sensor element 3, a package 20 forming an internal space S storing the sensor element 3, a diaphragm part 64 that constitutes part of a wall part of the package 20 and is bent and deformed by reception of pressure, and a strain sensor 7 disposed at the diaphragm part 64.
申请公布号 JP2015152501(A) 申请公布日期 2015.08.24
申请号 JP20140028021 申请日期 2014.02.17
申请人 SEIKO EPSON CORP 发明人 IMAI HIDEO;KINUGAWA TAKUYA
分类号 G01L9/00;G01C19/5628 主分类号 G01L9/00
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