| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator in which a piezoelectric layer can be oriented preferentially to the (100) plane regardless of the base material, and occurrence of crack can be suppressed without causing any decrease in the amount of displacement, and to provide a liquid jet head, and a method of manufacturing a liquid jet head.SOLUTION: A piezoelectric actuator including a flow path formation substrate 10 provided with a plurality of pressure generation chambers 12, and a diaphragm 50 provided on the flow path formation substrate 10 is further provided with a first electrode 60 formed corresponding to the pressure generation chamber 12, a first seed layer 65 provided on the first electrode 60, a second seed layer 66 provided at at least a position of the diaphragm 50 adjacent to the first electrode 60, a first piezoelectric layer 71 provided on the first seed layer 65, and having a perovskite structure, a second piezoelectric layer 72 provided to cover the first piezoelectric layer 71 and second seed layer 66, and a second electrode 80 provided on the second piezoelectric layer 72. The first piezoelectric layer 71 and second piezoelectric layer 72 are oriented preferentially to the (100) plane. |
