| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a double side coating apparatus and a double side coating method which enable uniform coating with a coating liquid even when both sides of a substrate are to be coated simultaneously, and to provide a coating film formation system that incorporates the double side coating apparatus.SOLUTION: While a substrate 5 is being transported by a transportation mechanism 60, both front and back surfaces of the substrate 5 are coated with a coating liquid from a first coating nozzle 20 and a second coating nozzle 40, simultaneously. Pulsation resultant from a force-feeding pump occurs in a discharge pressure of the coating liquid discharged out of the first coating nozzle 20 and the second coating nozzle 40. A control part 90 controls the liquid-feeding mechanism pump so that a phase difference between the pulsation of the discharge pressure of the first coating nozzle 20 and that of the discharge pressure of the second coating nozzle 20 may be 60° or less. If the phase difference between the pulsations of both the discharge pressures is 60° or less, a fluctuation in the differential pressure between both the discharge pressures becomes 4% or less, so that the substrate can be coated uniformly.</p> |
