| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and device for evaluating a crystal defect in a sample with higher sensitivity than a conventional manner by making the defect apparent about a sample having extremely small defect amount.SOLUTION: There is provided a method and device for evaluating a crystal defect in a sample with higher sensitivity than a conventional manner by making a defect apparent by emitting high energy electron beams in advance, and applying a cathode luminescence method.</p> |
