发明名称 SEMICONDUCTOR DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a resistance element in which noise is reduced.SOLUTION: A semiconductor device comprises a P-type diffusion resistance element 100a formed in an N-type diffusion layer 102 on a P-type semiconductor substrate. The P-type diffusion resistance element 100a has: a resistor made of a semiconductor resistance layer 103; and a stressor film 106 that is a first insulating film formed on the resistor. The first insulating film is an insulating film for applying distortion stress on the resistor and comprises a slit 107 that is opened on the resistor and reduces the carrier mobility in a direction other than a current direction.</p>
申请公布号 JP2015149455(A) 申请公布日期 2015.08.20
申请号 JP20140022960 申请日期 2014.02.10
申请人 PANASONIC IP MANAGEMENT CORP 发明人 SHIMANOE KAZUHIRO
分类号 H01L21/822;H01L27/04 主分类号 H01L21/822
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