发明名称 TERAHERTZ WAVE PHASE DIFFERENCE MEASUREMENT SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a high-sensitivity terahertz wave phase difference measurement system with high SN ratio.SOLUTION: A terahertz wave generation/detection device obtains a high SN ratio by using a terahertz wave generator irradiating a nonlinear optical crystal with pump light and seed light while satisfying angle phase matching and a terahertz wave detector irradiating the nonlinear optical crystal with the pump light and a terahertz wave while satisfying the angle phase matching. A half mirror and a movable reference mirror are used in the terahertz wave generation/detection device to observe a terahertz interference wave, calculating a phase difference. Regardless of the position of the movable reference mirror and the position of a measuring object, a first optical delay unit and a second optical delay unit interlocking with the movement of the movable reference mirror of a Michelson interferometer are introduced on the optical path of the pump light, in order to match optical path lengths of the pump light and the terahertz wave with one another.
申请公布号 JP2015148523(A) 申请公布日期 2015.08.20
申请号 JP20140021836 申请日期 2014.02.07
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 SHIROMIZU NOBUHIRO
分类号 G01N21/3581;G01B11/06;G01B11/24 主分类号 G01N21/3581
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