摘要 |
PROBLEM TO BE SOLVED: To provide a high-sensitivity terahertz wave phase difference measurement system with high SN ratio.SOLUTION: A terahertz wave generation/detection device obtains a high SN ratio by using a terahertz wave generator irradiating a nonlinear optical crystal with pump light and seed light while satisfying angle phase matching and a terahertz wave detector irradiating the nonlinear optical crystal with the pump light and a terahertz wave while satisfying the angle phase matching. A half mirror and a movable reference mirror are used in the terahertz wave generation/detection device to observe a terahertz interference wave, calculating a phase difference. Regardless of the position of the movable reference mirror and the position of a measuring object, a first optical delay unit and a second optical delay unit interlocking with the movement of the movable reference mirror of a Michelson interferometer are introduced on the optical path of the pump light, in order to match optical path lengths of the pump light and the terahertz wave with one another. |