Method of Calibrating a Reluctance Actuator Assembly, Reluctance Actuator and Lithographic Apparatus Comprising Such Reluctance Actuator

摘要

A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.

主权项

1. A linear reluctance actuator, comprising:
a stator comprising:
a stator yoke forming a closed magnetic path around a center space,a plurality of teeth, each tooth of the plurality of teeth projecting from the stator yoke into the center space, anda plurality of coils, each coil of the plurality of coils being configured to generate a magnetic flux in respective ones of the teeth; and a mover arranged in the center space, the mover comprising a plurality of faces, each face of the plurality of faces facing a respective one of the teeth to form a gap between the mover and the respective one of the teeth.