| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of cleaning a liquid crystal display device that can exhibit a sufficient cleaning effect on impurities generated by UV irradiation and can improve yield.SOLUTION: In a cleaning step in a manufacturing method of a liquid crystal display device including a display panel having a liquid crystal layer held between substrates, the substrates are cleaned with shower of cleaning fluid 322 of a flow rate distribution (c) having a single peak.</p> |
