发明名称 ブロックポリマー
摘要 PROBLEM TO BE SOLVED: To provide a block polymer that has good productivity and can form a self-organized thin film having a large dot pattern and to provide a method for producing the block polymer.SOLUTION: A block polymer includes as at least one kind of block chain constituting the molecule a block chain being a copolymerized product of an acrylic acid ester and a methacrylic acid ester and in addition to the block chain, includes a block chain composed of a polymerized product of styrene. In the block polymer, (1) the block polymer has a microphase-separated structure and the microphase-separated structure is a sea-island structure; (2) one or more kinds of block chains are synthesized by living radical polymerization; (3) the number average molecular weight is not less than 200,000 to not more than 1,000,000; (4) the molecular weight distribution is not more than 1.5; and (5) the dot remaining by plasma etching after annealing has an average diameter of not less than 100 nm.
申请公布号 JP5766241(B2) 申请公布日期 2015.08.19
申请号 JP20130162053 申请日期 2013.08.05
申请人 旭化成ケミカルズ株式会社 发明人 田中 賢哉
分类号 C08F293/00;C08F297/02;G03F7/40;H01L21/027 主分类号 C08F293/00
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