Methods of manufacturing large-area sputtering targets using interlocking joints

摘要

In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.

主权项

1. A method of forming a joined sputtering target comprising a sputtering material, the method comprising:
forming a mechanical joint between two discrete sputtering-target tiles by (i) overlapping or (ii) overlapping and interlocking the tiles at an interface therebetween, the interface comprising a recess over the mechanical joint, and each of the tiles consisting essentially of the sputtering material; after (i) overlapping or (ii) overlapping and interlocking the tiles at the interface therebetween, joining the tiles by welding the mechanical joint; and thereafter, spray-depositing a spray material over at least a portion of the welded mechanical joint to substantially fill at least a portion of the recess, thereby forming the joined sputtering target.