Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus

摘要

The method includes: calculating an increment of a sliding distance of a dresser by multiplying a relative speed between the dresser and a polishing member by a contact time between them; correcting the increment of the sliding distance by multiplying the calculated increment of the sliding distance by at least one correction coefficient; calculating the sliding distance by repeatedly adding the corrected increment of the sliding distance to the sliding distance according to elapse of time; and producing the sliding-distance distribution of the dresser from the obtained sliding distance and a position of a sliding-distance calculation point. The at least one correction coefficient includes an unevenness correction coefficient provided for the sliding-distance calculation point. The unevenness correction coefficient is a correction coefficient that allows a profile of the polishing member to reflect a difference between an amount of scraped material of the polishing member in its raised portion and an amount of scraped material of the polishing member in its recess portion.

主权项

1. A method of obtaining a sliding-distance distribution of a dresser sliding on a polishing member for polishing a substrate, the method comprising:
calculating a relative speed between the dresser and the polishing member at a predetermined sliding-distance calculation point on the polishing member; calculating an increment of a sliding distance of the dresser at the sliding-distance calculation point by multiplying the relative speed by a contact time during which the dresser contacts the polishing member at the sliding-distance calculation point; correcting the increment of the sliding distance by multiplying the calculated increment of the sliding distance by at least one correction coefficient; updating the sliding distance by adding the corrected increment of the sliding distance to a current sliding distance at the sliding-distance calculation point; and producing a sliding-distance distribution of the dresser from the updated sliding distance and a position of the sliding-distance calculation point, wherein the at least one correction coefficient includes an unevenness correction coefficient provided for the sliding-distance calculation point, wherein the unevenness correction coefficient is a correction coefficient that allows a profile of the polishing member to reflect a difference between an amount of scraped material of the polishing member in a raised portion and an amount of scraped material of the polishing member in a recess portion, and wherein the correcting of the increment of the sliding distance comprises correcting the increment of the sliding distance by multiplying the increment of the sliding distance by the unevenness correction coefficient.