透明导电性层合体、透明导电性层合体之制造方法、及使用透明导电性层合体而成之电子装置;TRANSPARENT CONDUCTIVE LAMINATED BODY, METHOD FOR PRODUCING THE SAME, AND ELECTRONIC DEVICE USING THE SAME

摘要

本发明系提供一种具有优异湿热特性之透明导电性层合体、透明导电性层合体之制造方法及使用如此之透明导电性层合体而成之电子装置。;其特征为于基材上之至少一面形成透明导电层而成之透明导电性层合体等，透明导电层系与包含氧化锌一起，掺杂镓及铟而成之氧化锌膜，关于藉由深度方向之XPS分析所测定之锌量、镓量、氧量、及铟量，该氧化锌膜包含具有不均匀浓度分布之复数区域，且该复数区域系包含[In]/[Ga]之值不同的第1区域及第2区域。;The present invention is directed to a transparent conductive laminated body and the like, wherein a transparent conductive layer is formed on at least one surface of a substrate, the transparent conductive layer including a zinc oxide is a zinc oxide film which is doped with gallium and indium, and which contains plural of uneven concentration regions in zinc, gallium, oxygen and indium measured by XPS analysis in the direction of thickness, and a first region and a second region as the uneven concentration region has the different value of [In]/[Ga] respectively.