| 发明名称 |
CHARGED PARTICLE BEAM APPARATUS |
| 摘要 |
A charged particle beam apparatus includes a charged particle beam source which irradiates a sample with a charged particle beam, an electromagnetic lens, a lens control electric source for controlling strength of a convergence effect of the electromagnetic lens; and a phase compensation circuit which is connected to the lens control electric source in parallel with the electromagnetic lens, and controls a lens current at the time of switching the strength of the convergence effect of the electromagnetic lens such that the lens current monotonically increases or monotonically decreases. |
| 申请公布号 |
US2015228443(A1) |
申请公布日期 |
2015.08.13 |
| 申请号 |
US201514616658 |
申请日期 |
2015.02.07 |
| 申请人 |
Hitachi High-Technologies Corporation |
发明人 |
MORITA Kenichi;TANIMOTO Sayaka;SAKAKIBARA Makoto;FUKUDA Muneyuki;SUZUKI Naomasa;OBARA Kenji |
| 分类号 |
H01J37/141;H01J37/22;H01J37/26 |
主分类号 |
H01J37/141 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A charged particle beam apparatus, comprising:
a charged particle beam source which irradiates a sample with a charged particle beam; an electromagnetic lens; a lens control electric source for controlling strength of a convergence effect of the electromagnetic lens; and a phase compensation circuit which is connected to the lens control electric source in parallel with the electromagnetic lens, and controls a lens current at the time of switching the strength of the convergence effect of the electromagnetic lens such that the lens current monotonically increases or monotonically decreases. |
| 地址 |
Tokyo JP |
