发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor device including an oxide semiconductor in which on-state current is high is provided. The semiconductor device includes a first transistor provided in a driver circuit portion and a second transistor provided in a pixel portion; the first transistor and the second transistor have different structures. Furthermore, the first transistor and the second transistor are transistors having a top-gate structure. In an oxide semiconductor film of each of the transistors, an impurity element is contained in regions which do not overlap with a gate electrode. The regions of the oxide semiconductor film which contain the impurity element function as low-resistance regions. Furthermore, the regions of the oxide semiconductor film which contain the impurity element are in contact with a film containing hydrogen. The first transistor provided in the driver circuit portion includes two gate electrodes between which the oxide semiconductor film is provided.
申请公布号 WO2015118472(A1) 申请公布日期 2015.08.13
申请号 WO2015IB50867 申请日期 2015.02.05
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 KOEZUKA, JUNICHI;JINTYOU, MASAMI;SHIMA, YUKINORI;KUROSAKI, DAISUKE;NAKADA, MASATAKA;YAMAZAKI, SHUNPEI
分类号 H01L29/786;G02F1/1368;G09F9/30;H01L21/336;H01L21/822;H01L21/8234;H01L27/04;H01L27/06;H01L27/08;H01L27/088;H01L51/50;H05B33/14 主分类号 H01L29/786
代理机构 代理人
主权项
地址