| 摘要 |
A pressure-adjusting lapping element (132, 232, 332, 432, 532) is included as a structural component of a carrier assembly (130, 230, 330) in a lapping head (116). The lapping element includes actuator nodes (274, 474, 574) that permit fine tuning of a lapping force applied through the lapping element to a work piece (224, 324, 424, 524). An actuator assembly (246) is directly attached to the lapping element and manipulates the individual actuator nodes. The lapping element further includes whippletree structure to permit a desired degree of flexibility in the lapping element to respond to force inputs at the actuator nodes. |
