发明名称 |
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE THEREOF |
摘要 |
An embodiment of the present invention relates to a method of manufacturing a semiconductor device and a semiconductor device thereof. A technical objective to be solved is to provide a method of manufacturing a semiconductor device which is thin, has excellent electrical properties and small warpage without using a PCB, and a semiconductor device thereof. For this, the method of manufacturing a semiconductor device includes a step of forming a back end of line (BEOL) layer on a dummy substrate; a step of electrically connecting the BEOL and a semiconductor die; a step of firstly encapsulating the BEOL layer and the semiconductor layer with a first encapsulant; a step of removing the dummy substrate from the BEOL layer; a step of connecting a solder ball to the BEOL layer; a step of secondarily connecting the BEOL and the solder ball with a second encapsulant; and a step of electrically connecting a semiconductor package to the BEOL layer. |
申请公布号 |
KR20150091932(A) |
申请公布日期 |
2015.08.12 |
申请号 |
KR20140012762 |
申请日期 |
2014.02.04 |
申请人 |
AMKOR TECHNOLOGY KOREA, INC. |
发明人 |
PAEK, JONG SIK;PARK, DOO HYUN |
分类号 |
H01L23/12;H01L23/48 |
主分类号 |
H01L23/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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