PURIFIER CASSETTE

摘要

This disclosure relates to connection systems for fluid connections. Even more particularly, some embodiments relate to fluid connections for use with semiconductor manufacturing fluids. The connection system uses a connection nut (110) that seals fluid fittings (112, 114) with less than 360 degrees of rotation of the connection nut by making use of multi-start threads in the nut (110). According to one embodiment, the connection nut creates at least 360 degrees of threaded engagement with less than 360 degrees of rotation. Embodiments further provide connection systems that can seal multiple ports simultaneously.