发明名称 Transistor and method of fabricating the same
摘要 Provided is a transistor. The transistor includes: a substrate; a semiconductor layer provided on the substrate and having one side vertical to the substrate and the other side facing the one side; a first electrode extending along the substrate and contacting the one side of the semiconductor layer; a second electrode extending along the substrate and contacting the other side of the semiconductor layer; a conductive wire disposed on the first electrode and spaced from the second electrode; a gate electrode provided on the semiconductor layer; and a gate insulating layer disposed between the semiconductor layer and the gate electrode, wherein the semiconductor layer, the first electrode, and the second electrode have a coplanar.
申请公布号 US9105726(B2) 申请公布日期 2015.08.11
申请号 US201414192239 申请日期 2014.02.27
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 Cho Sung Haeng;Park Sang-Hee;Hwang Chi-Sun
分类号 H01L29/786;H01L29/66;H01L29/417 主分类号 H01L29/786
代理机构 Rabin & Berdo, P.C. 代理人 Rabin & Berdo, P.C.
主权项 1. A transistor comprising: a substrate; a semiconductor layer provided on the substrate and having one side vertical to the substrate and the other side facing the one side; a first electrode extending along the substrate and contacting the one side of the semiconductor layer; a second electrode extending along the substrate and contacting the other side of the semiconductor layer; a conductive wire disposed on the first electrode and spaced from the second electrode; a gate electrode provided on the semiconductor layer; a gate insulating layer disposed between the semiconductor layer and the gate electrode, and an interlayer insulating layer provided directly on the semiconductor layer and covering the gate electrode, wherein the interlayer insulating layer is not vertically over the one side and the other side of the semiconductor layer, wherein the semiconductor layer, the first electrode, and the second electrode have a coplanar level surface.
地址 Daejeon KR