Unit pixels, depth sensors and three-dimensional image sensors including the same

摘要

A unit pixel of a depth sensor includes a light-receiver configured to perform photoelectric conversion of an incident light to output an electrical signal and at least two sensors adjacent to the light-receiver to receive the electrical signal from the light-receiver such that a line connecting the sensors forms an angle greater than zero degrees with respect to a first line, the first line passing through a center of the light-receiver in a horizontal direction.

主权项

1. A unit pixel of a depth sensor, the unit pixel comprising:
a body including a substrate and an isolation layer on the substrate, the body including a first surface, a second surface and a third surface, the second surface being arranged opposite to the third surface, the body including a trench extending from the second surface through the third surface, the trench being formed below the first surface of the body, the body further including a first ridge on one side of the trench and a second ridge on the other side of the trench; a light receiver in the trench of the body, the light receiver being configured to perform a photoelectric conversion of incident light and to generate an electrical signal; a first photo gate on a first surface of the light receiver; a second photo gate on the first surface of the light receiver; a first sensor in or on the first ridge, the first sensor being adjacent to the second surface of the body such that a shortest distance between the first sensor and the second surface of the body is less than a shortest distance between the first sensor and the third surface of the body, the first sensor being adjacent to the first photo gate such that a shortest distance between the first sensor and the first photo gate is less than a shortest distance between the first sensor and the second photo gate; and a second sensor in or on the second ridge, the second sensor being adjacent to the third surface of the body such that a shortest distance between the second sensor and the third surface of the body is less than a shortest distance between the second sensor and the second surface of the body, the second sensor being adjacent to the second photo gate such that a shortest distance between the second sensor and the second photo gate is less than a shortest distance between the second sensor and the first photo gate, wherein the first sensor and the second sensor are configured to receive the electrical signal from the light receiver, the first photo gate is configured to control a transfer of the electrical signal to the first sensor, the second photo gate is configured to control a transfer of the electrical signal to the second sensor, and a first imaginary line connecting the center of the first sensor and the center of the second sensor forms an angle greater than zero degree with respect to a second imaginary line passing through a first point and a second point on the first surface of the light receiver, a shortest distance between the first point and the second surface of the body being equal to a shortest distance between the first point and the third surface of the body, a shortest distance between the second point and the second surface of the body being equal to a shortest distance between the second point and the third surface of the body, a location of the first point being different from a location of the second point, the second imaginary line passing through the center of the first surface of the light receiver.