发明名称 DECOMPRESSING JIG AND A METHOD FOR APPLYING PRESSURE ON A WORKPIECE BY USING THE DECOMPRESSING JIG
摘要 To provide a decompressing jig that can apply pressure on a workpiece after a space for accommodating the workpiece is sufficiently decompressed and a method for applying pressure on a workpiece by using the decompressing jig. The decompressing jig 1 is configured by integrating a first member for decompression 10, a second member for decompression 20, a sealing member 30, a first member for preliminary decompression 40, and a second member for preliminary decompression 50. The first member for decompression 10 is formed by spreading a first sheet 12 made of a flexible sheet across a first frame 11. In the first frame 11 a path for suction 15 that is connected to a device for suction via a port for suction 14 and that is connected to a space S for accommodating the workpiece is formed. The first member for preliminary decompression 40 forms a chamber Y for preliminary decompression between it and the first sheet 12 so that the chamber Y can be decompressed.
申请公布号 US2015217529(A1) 申请公布日期 2015.08.06
申请号 US201314419560 申请日期 2013.09.13
申请人 SINTOKOGIO, LTD. 发明人 Nagasaka Masahiko;Nakajima Shogo;Sugino Osamu;Furukawa Kyoji
分类号 B30B5/02;H01L21/56 主分类号 B30B5/02
代理机构 代理人
主权项 1. A decompressing jig that decompresses a space for accommodating a workpiece to apply pressure on the workpiece by a pressing device, the decompressing jig comprising: a first member for decompression having a first frame that is shaped like a frame and a first sheet that is spread across the first frame; a member for holding the workpiece that faces the first member for decompression so that the workpiece is accommodated between the member for holding the workpiece and the first member for decompression; a sealing member that is disposed between the first frame and the member for holding the workpiece and that forms the space for accommodating the workpiece, in an airtight manner, by enclosing the space between the first member for decompression and the member for holding the workpiece; and a first member for preliminary decompression that is disposed to face the first member for decompression on the side opposite the member for holding the workpiece so as to form a chamber for preliminary decompression between the first member for preliminary decompression and the first sheet and that is configured to decompress the chamber for preliminary decompression.
地址 NAGOYA-SHI, AICHI JP