MEMS SENSOR WITH DECOUPLED DRIVE SYSTEM

摘要

In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements.

主权项

1. An angular rate sensor comprising;
a substrate; a rotating structure coupled to the substrate; a drive mass coupled to the substrate; a flexible element coupling the drive mass and the rotating structure; an actuator coupled to the rotating structure via the drive mass for driving the rotating structure into rotational oscillation around a first axis normal to the substrate; a first transducer responsive to the rotational oscillation of the rotating structure during a drive mode; and a second transducer which is responsive to the angular velocity of the angular rate sensor.