发明名称 |
A GAS CIRCULATION LOOP FOR A LASER DISCHARGE TUBE |
摘要 |
The present invention is directed to a circulation loop for a laser discharge tube comprising a gas supply duct adapted such that the gas enters the laser discharge tube in the latter's transversal direction, and a gas exhaust duct, characterized in that the gas supply duct is elongated in the longitudinal direction of the laser discharge tube. Further, the present invention is directed to a laser apparatus comprising such gas circulation loop. |
申请公布号 |
EP2898575(A1) |
申请公布日期 |
2015.07.29 |
申请号 |
EP20130770665 |
申请日期 |
2013.09.24 |
申请人 |
LASER SYSTEMS AND SOLUTIONS OF EUROPE |
发明人 |
CHASTAN, NICOLAS;GRELLET, JULIEN |
分类号 |
H01S3/036;H01S3/22;H01S3/223;H01S3/225 |
主分类号 |
H01S3/036 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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