发明名称 A GAS CIRCULATION LOOP FOR A LASER DISCHARGE TUBE
摘要 The present invention is directed to a circulation loop for a laser discharge tube comprising a gas supply duct adapted such that the gas enters the laser discharge tube in the latter's transversal direction, and a gas exhaust duct, characterized in that the gas supply duct is elongated in the longitudinal direction of the laser discharge tube. Further, the present invention is directed to a laser apparatus comprising such gas circulation loop.
申请公布号 EP2898575(A1) 申请公布日期 2015.07.29
申请号 EP20130770665 申请日期 2013.09.24
申请人 LASER SYSTEMS AND SOLUTIONS OF EUROPE 发明人 CHASTAN, NICOLAS;GRELLET, JULIEN
分类号 H01S3/036;H01S3/22;H01S3/223;H01S3/225 主分类号 H01S3/036
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