Control circuitry routing configuration for MEMS devices

摘要

A method for constructing a MEMS system includes first depositing on a surface of a substrate a first plurality of thin film layers formed of dielectric material. The first plurality of thin-film layers includes at least one conductive trace extending a distance on the substrate, parallel to the surface. A second plurality of layers is then deposited to form at least one MEMS device. The MEMS device is responsive to a control signal applied to a first input terminal and an electrical connection is formed from the conductive trace to the input terminal.

主权项

1. A method for constructing a MEMS system, comprising:
first depositing on a surface of a substrate a first plurality of thin-film layers formed of dielectric material; integrating a dense routing network into said first plurality of thin-film layers for communicating control signals to a plurality of MEMS devices by including between two adjacent thin-film layers of said first plurality of thin-film layers at least one conductive trace extending a distance on said substrate, parallel to said surface; second depositing over said first plurality of thin-film layers a second plurality of layers including at least one layer each of a conductive material and a dielectric material to form at least one MEMS device which is responsive to a control signal applied to a first input terminal of said MEMS device and which resides above said dense routing network; and forming an electrical connection from said at least one conductive trace to said first input terminal.