METHOD AND APPARATUS FOR MANUFACTURING MONOCRYSTALLINE INGOT

摘要

According to an embodiment of the present invention, a single crystal ingot manufacturing method is executed by a single crystal ingot manufacturing apparatus which includes a crucible storing the melt and a water-cooling pipe cooling a single crystal ingot grown in the melt. The method includes a step of exponentially increasing the ratio of the pulling rate of the single crystal ingot to the temperature different of the single crystal ingot in the radial direction in proportion to the pulling rate while the single crystal ingot is grown.