| 摘要 |
PURPOSE: A pellicle container is provided to prevent impurity attachment to the pellicle by covering pellicle fixed to a container body, with a covering material and to easily unlock the fixed state to withdraw the pellicle. CONSTITUTION: A pellicle container consists of a container body accommodating a pellicle(16) and a covering material(14) covering a pellicle. The container body comprises a pin(28) which is rotatable by inserting a front end into a concave part(26) of a pellicle frame(16a); and a plurality of pellicle fixing part(18) each of which has a pin-mounting part(32). A protrusion part and a notch part which prevent separation of the front end part(28a) of the pin, from the concave part, are mounted to the pin-mounting part of the pellicle fixing part. |
