发明名称 LIQUID CHEMICAL EVAPORATING DEVICE AND LIQUID CHEMICAL EVAPORATING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide a liquid chemical evaporating device that can evaporate liquid chemical in the air with high performance.SOLUTION: A liquid chemical evaporating device includes: evaporating devices 10a-10d for evaporating liquid chemical in the air by sending air into the liquid chemical and performing aeration; a liquid chemical tank 11 for storing the liquid chemical; a liquid chemical pump 12 for supplying the liquid chemical from the liquid chemical tank 11 to the evaporating devices 10a-10d; an air pump 13 for supplying air to the evaporating devices 10a-10d; a chamber 14 for collecting air containing the liquid chemical obtained by the evaporating devices 10a-10d; a blower 15 for sending out air containing the liquid chemical in the chamber 14; and a waste liquid tank 16 for storing the liquid chemical discharged from the evaporating device 10d.</p>
申请公布号 JP2015130846(A) 申请公布日期 2015.07.23
申请号 JP20140005406 申请日期 2014.01.15
申请人 ES TECHNOLOGY KK 发明人 TACHIKAWA HIROSHI
分类号 A01M7/00 主分类号 A01M7/00
代理机构 代理人
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