APPARATUS AND METHOD FOR THE REDUCTION OF IMPURITIES IN FILMS
摘要
A plasma generator is described which employs a partial PBN liner not only to minimise the loss of energetic gas species during film formation but also to reduce boron impurity levels introduced into the growing film relative to the use of a complete PBN liner. The use of such a plasma generator in a film forming apparatus and method of forming a film is also described.
申请公布号
WO2015106318(A1)
申请公布日期
2015.07.23
申请号
WO2015AU50013
申请日期
2015.01.15
申请人
GALLIUM ENTERPRISES PTY LTD
发明人
MANN, IAN;BARIK, SATYANARAYAN;WINTREBERT-FOUQUET, MARIE;BROWN, JOSH;DUNNIGAN, PAUL