Surface Cleaning Method and Apparatus Using Surface Acoustic Wave Devices

摘要

An apparatus, system, and method for cleaning surfaces is presented. One embodiment of the system includes an array of surface acoustic wave (SAW) transducers coupled to a substrate. The system may include a positioning mechanism coupled to at least one of a target surface or the array of SAW transducers, and configured to position the array of SAW transducers within an effective cleaning distance of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of SAW transducers to the target surface. The system may further include a controller coupled to the array of SAW transducers and configured to activate the array of SAW transducers. At least one of the SAW transducers may be formed to focus cleaning liquid on a focal point and jet cleaning liquid in a direction substantially out of the place of the SAW transducer.

主权项

1. A method comprising:
providing an array of surface acoustic wave (SAW) transducers; positioning the array of SAW transducers within an effective cleaning distance of a target surface; coupling the array of SAW transducers to the target surface via a cleaning liquid; and directly exciting a particles on the target surface with acoustic waves at one or more frequencies in the range of 1 Megahertz to 10 Gigahertz from the array of SAW transducers.