Thermoelectric Micro-Platform for Cooling and Temperature Sensing

摘要

A thermoelectric micro-platform includes a suspended micro-platform, the suspended micro-platform being configured as a support layer with a device layer disposed thereon. Two arrays of series-connected thermoelectric devices are disposed partially on the micro-platform. One array is operated as Peltier coolers and the other array is operated as Seebeck sensors.

主权项

1. An apparatus comprising a thermoelectric micro-device, wherein the thermoelectric micro-device comprises:
a micro-platform, the micro-platform having a support layer that is suspended at a perimeter thereof, and a device layer disposed on a portion of the support layer; an off-platform region, the off-platform region surrounding the micro-platform; a plurality of thermoelectric devices organized into a first group and a second group, wherein a first junction of each thermoelectric device is disposed in or on the device layer and a second junction of each thermoelectric device is disposed in or on the off-platform region, wherein:
(i) the first group of thermoelectric devices is operated in a Seebeck thermovoltaic mode wherein a voltage is generated responsive to the temperature of the first junction of each thermoelectric device in the first group, and(ii) the second group of thermoelectric devices is operated in a Peltier cooling mode wherein the first junction of each thermoelectric device in the second group cools responsive to the application of a voltage to the second group of thermoelectric devices; a first plurality of nanowires, wherein the first plurality of nanowires electrically couple the first junctions to respective second junctions.