发明名称 METHOD FOR MANUFACTURING THIN FILM LAYER PATTERN, DISPLAY SUBSTRATE, METHOD FOR MANUFACTURING DISPLAY SUBSTRATE, AND DISPLAY DEVICE
摘要 A method for manufacturing a thin film layer pattern, a display substrate, a method for manufacturing the display substrate, and a display device. The method for manufacturing the thin film layer pattern comprises: forming on a substrate (10) a first thin film layer (11) to be patterned; forming a first covering layer (20) on the surface of the first thin film layer (11); forming a first covering layer pattern (201) by means of beam melting; and then removing the first thin film layer (11) not covered by the first covering layer pattern (201), so as to form a first thin film layer pattern (101). The method can, by means of the beam melting technique, enhance precision and resolution of the display substrate, improve product quality and reduce production cost.
申请公布号 WO2015106545(A1) 申请公布日期 2015.07.23
申请号 WO2014CN80903 申请日期 2014.06.27
申请人 BOE TECHNOLOGY GROUP CO., LTD.;BEIJING BOE DISPLAY TECHNOLOGY CO., LTD. 发明人 XU, LIYAN;TIAN, MING;WANG, JUNWEI
分类号 G03F7/00;G02F1/1333 主分类号 G03F7/00
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