WELDED PORTION INSPECTION APPARATUS AND INSPECTION METHOD THEREOF

摘要

A welding laser beam (L1) is radiated along welding loci (C11, C12) set in workpieces (W1, W2), or an inspection laser beam (L5) is radiated along scanning loci (C51, C52) set in a molten pool (Y1) of the workpieces (W1, W2) that are molten by radiation of the welding laser beam (L1), a returned light beam (L2) including reflection light from the molten pool (Y1) of the workpieces, vapor light caused due to melting and evaporation of the workpieces, and thermal radiation light emitted from the molten pool (Y1) of the workpieces is received, and a welding state of a welded portion of the workpieces is inspected based on an intensity change of the returned light beam (L2) thus received.