Microwave Processing Apparatus and Microwave Processing Method

摘要

A microwave processing apparatus for processing a substrate by irradiating a microwave to the substrate includes: a processing container configured to accommodate a substrate; and a microwave introducing device configured to have a microwave source that generates a microwave and introduce the microwave into a microwave radiation space within the processing container. The microwave introducing device includes: a waveguide configured to form a transmission path to guide the microwave into the processing container; a first microwave transmission window interposed between the transmission path and the microwave radiation space; and a second microwave transmission window installed to be closer to the microwave source than the first microwave transmission window, and configured to change a traveling direction of the microwave.

主权项

1. A microwave processing apparatus for processing a substrate by irradiating a microwave to the substrate, comprising:
a processing container configured to accommodate a substrate; and a microwave introducing device configured to have a microwave source that generates a microwave and introduce the microwave into a microwave radiation space within the processing container, wherein the microwave introducing device comprises:
a waveguide configured to form a transmission path to guide the microwave into the processing container;a first microwave transmission window interposed between the transmission path and the microwave radiation space; anda second microwave transmission window installed to be closer to the microwave source than the first microwave transmission window, and configured to change a traveling direction of the microwave.