发明名称 TUBULAR TARGET
摘要 A target for a cathode atomization system has a tubular target body made of an atomization material and two connection pieces, fastenable to the target body, for connecting the target body to a cathode atomization system. A first connection piece is connectable to a first end of the target body and a second connection piece is connectable to a second end of the target body. At least one locking device is formed on each connection piece, in order to connect the respective connection piece to the target body so that it is secured against rotation.
申请公布号 EP2896064(A1) 申请公布日期 2015.07.22
申请号 EP20130785810 申请日期 2013.09.13
申请人 PLANSEE SE 发明人 MUTSCHLECHNER, WALTER;DRONHOFER, ANDRÉ;LINKE, CHRISTIAN
分类号 H01J37/34;C23C14/35 主分类号 H01J37/34
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