| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a sphere diameter dimension measuring method of a sphere and a measuring apparatus for the same for measuring a sphere dimension of a sphere to be measured in short time with high accuracy and by a simple method by using coherent light. <P>SOLUTION: A sphere diameter of a sphere 1 to be measured is measured from travel of a bright point of an Arago spot which deviates according to a position of the bright point of the Arago spot or the sphere diameter of the sphere 1 to be measured by using the bright point of the Arago spot to be constituted of an interference band to be generated at a part in a shadow of the sphere 1 to be measured by irradiating the sphere 1 to be measured with coherent light and the bright point. The sphere diameter of the sphere 1 to be measured is calculated by being converted from a relational expression between the travel of the bright point of the Arago spot obtained by being preliminarily measured by using geometrical means, or the position of the bright point of the Arago spot converted into an electric signal or the travel of the bright point of the Arago spot and the sphere diameter of the sphere 1. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
