Method and system for recycling processing gas for selenization of thin film photovoltaic materials

摘要

A system for recycling a work gas used in a thermal reactor for treating sample materials includes a thermal reactor using a work gas from a first source mixed with carrier gases. The work gas has a boiling point higher than the carrier gases. The system includes a pump, a condenser which converts the work gas into a liquid, and a scrubber.

主权项

1. A method for recycling a work gas used for a thermal reactive process, the method comprising:
supplying a process gas including a work gas mixed with one or more carrier gases for a thermal reactive process in a furnace, the work gas being characterized by a first boiling point higher than a highest boiling point of any of the one or more carrier gases; pumping down the furnace after the thermal reactive process to at least partially remove remaining process gas; operating the condenser to liquefy the work gas at a temperature below the first boiling point and above the highest boiling point of any of the one or more carrier gases; and transferring the liquefied work gas to a boiler for converting the liquefied work gas to a vapor, the vapor being part of the work gas for forming the process gas.