Thermoacoustic device array

摘要

A thermoacoustic device array includes a substrate and a plurality of thermoacoustic device units located on a surface of the substrate. The substrate defines a number of recesses on the surface, and the recesses are spaced from and parallel with each other. Each thermoacoustic device unit includes a sound wave generator, a first electrode and a second electrode. The first electrode and the second electrode are spaced from each other and electrically connected to the sound wave generator. The sound wave generator is located on the surface and suspended over the recesses. At least one of the recesses is located between the first electrode and the second electrode, and one portion of the sound wave generator that is between the first electrode and the second electrode is suspended over the at least one of the recesses.

主权项

1. A thermoacoustic device array, the thermoacoustic device array comprising:
a substrate having a surface, wherein the substrate defines a plurality of recesses on the surface of the substrate, and the plurality of recesses are spaced from and parallel with each other; a plurality of thermoacoustic device units located on the surface of the substrate; each of the plurality of thermoacoustic device units comprising:
a sound wave generator located on the surface of the substrate and suspended over the plurality of recesses;a first electrode and a second electrode spaced from each other and electrically connected to the sound wave generator, wherein at least one of the plurality of recesses is located between the first electrode and the second electrode, and one portion of the sound wave generator that is between the first electrode and the second electrode is suspended over the at least one of the plurality of recesses.