| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of measuring an arrangement of a processed body and a mask, arranged oppositely to each other, with high precision that secures measurement precision and prevents the degree of vacuum from decreasing at a low cost even when an organic EL device becomes large-sized, and also prevents maintainability from decreasing in a manufacturing apparatus for an organic EL device.SOLUTION: There is provided an apparatus 10 which manufactures an organic EL device by passage through a plurality of zones Z2 arranged in a film deposition chamber S provided between a processing chamber A for a process as a precedent stage and a processing chamber B for a process as a following stage and having a single pressure-reducible internal space S1. The manufacturing device for an organic EL device is provided with measurement means C10 and C20 of measuring relative positions of a processed body W and a mask M at vapor-deposition positions respectively, and has adjustment means XY of adjusting the relative positions on the basis of measurement results.</p> |
