发明名称 OPTICAL MEASUREMENT METHOD
摘要 <p>Provided is an optical measurement method whereby clear tomographic images can be obtained. This optical measurement method comprises: a first step in which an interference light spectrum is obtained; a second step in which the interference light spectrum is multiplied by a trial function that changes the impact of distribution, and a first evaluation image is obtained on the basis of the Fourier transform results for the interference light spectrum multiplied by the trial function; and a third step in which folded images (A, B) are removed from the first evaluation image to form a second evaluation image and an index value relating to the brightness of the second evaluation image is calculated, said folded images being formed by an image being folded back by Fourier transformation at a measurement origin point, said image corresponding to scattered reflected light (L4) that occurs further on the light source unit (10) side than the measurement origin point. A variety of trial functions are set and the second and third steps repeated a plurality of times. The trial function that provides the greatest information entropy among the plurality of trial functions is set as the distribution compensation function and a tomographic image is obtained by performing the second step using the distribution compensation function.</p>
申请公布号 WO2015104877(A1) 申请公布日期 2015.07.16
申请号 WO2014JP76882 申请日期 2014.10.08
申请人 SUMITOMO ELECTRIC INDUSTRIES,LTD. 发明人 HIRANO, MITSUHARU
分类号 G01N21/17 主分类号 G01N21/17
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