| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a space-saving conductance valve.SOLUTION: A conductance valve can adjust conductance by adjusting an opening degree of an opening 5 provided in a portion of a vacuum vessel, and comprises: a rectangular valve element 23; an arm part 25 that rotatably connects the valve element 23; a drive part 27a that rotates the arm part 25; a rotation restriction part that restricts rotating motion of the valve element 23 that rotates in association with rotation of the arm part 25 at a position where the opening 5 is closed; and a rotating motion conversion part 41 that brings the valve element 23 closer to a surface in which the opening 5 is formed when the rotating motion of the valve element 23 is restricted by the rotation restriction part.</p> |
