Batch process for three-dimensional integration

摘要

A chip package is described which includes a first chip having a first surface and first sides having a first side-wall angle, and a second chip having a second surface and second sides having a second side-wall angle, which faces and is mechanically coupled to the first chip. The chip package is fabricated using a batch process, and the chips in the chip package were singulated from their respective wafers after the chip package is assembled. This is accomplished by etching the first and second side-wall angles and thinning the wafer thicknesses prior to assembling the chip package. For example, the first and/or the second side walls can be fabricated using wet etching or dry etching. Therefore, the first and/or the second side-wall angles may be other than vertical or approximately vertical.

主权项

1. A chip package to house one or more semiconductor chips, comprising:
a first trapezoidal chip having a first surface and outer sides having a first side-wall angle other than vertical; and a second trapezoidal chip having a second surface and outer sides having a second side-wall angle other than vertical, wherein the second surface faces the first surface; and wherein the second chip is mechanically coupled to the first chip using multiple hybrid bonds in parallel, wherein one end of the hybrid bonds is coupled to the first surface of the first chip, and the other end of the hybrid bonds is coupled to the second surface of the second chip, wherein the second chip is coupled to the first chip in diving-board configuration, and wherein at least one edge of the second chip is used to provide optical access for global interconnections, wherein a triangular trench is formed by an outer side of the first trapezoidal chip and an outer side of a chip adjacent to the first trapezoidal chip on a wafer, and wherein the first trapezoidal chip and the chip adjacent to the first trapezoidal chip are separable by thinning down the wafer; wherein the first side-wall angle is approximately 54.74°; and wherein the second side-wall angle is approximately 54.74°; and wherein the second trapezoidal chip has a third face on an opposite side of the second face, wherein the chip package further comprises a third trapezoidal chip having a fourth face and outer sides having a third side-wall angle other than vertical, wherein the fourth face faces the third face, and wherein the third chip is coupled to the second chip in diving-board configuration.