Methods and apparatuses for forming semiconductor films

摘要

Described herein are systems and methods method for forming semiconductor films. In some embodiment, the methods comprising depositing the source solution containing a solvent and plurality of types of metal ionic species and a second type on a substrate heated to a temperature at or above the boiling point of the solvent. In some embodiments, methods and apparatus for exposing a substrate to a gas are also provided.

主权项

1. A solar cell comprising a semiconductor film, wherein the semiconductor film is formed by a method comprising the steps:
(a) depositing a source solution via a source solution outlet, wherein the source solution contains a solvent and at least a first type of metal ionic species a second type of metal ionic species dissolved therein on at least a portion of the substrate to form a preparatory film comprising the first type of metal ionic species and the second type of metal ionic species, wherein the substrate onto which the source solution is deposited is at a temperature at or above the boiling point of the solvent, wherein the solvent evaporates substantially immediately upon deposition of the source solution onto the substrate, and wherein the preparatory film has substantially uniform composition; (b) heating the preparatory film to form a stage I precursor film, wherein the heating is conducted under an atmosphere of an inert gas or air, thereby converting a substantial portion of the metal ionic species contained in the preparatory film into the related metal oxides; (c) heating the stage I precursor film under an atmosphere between about 50 Torr and about 760 Torr and exposing the stage I precursor film to recirculated and dried H2 gas to form a stage II precursor film, wherein the stage II precursor film comprises an alloy comprising the first type of metal species and the second type of metal species, each having an oxidation state of zero; and (d) exposing the stage II precursor film to a material comprising a Group 15 or Group 16element gas or vapor to form a semiconductor film, wherein the semiconductor film comprises a reaction product formed via a reaction between 1) the Group 15 or Group 16 element and 2) the first type of metal species and/or the second type of metal species, wherein the solar cell has an efficiency of at least about 10%.