METHOD FOR MANUFACTURING CONDUCTIVE PATTERN AND DEVICE HAVING CONDUCTIVE PATTERN

摘要

The present invention provides a method for forming a conductive pattern. The method for forming a conductive pattern includes: a step of forming a conductive layer on a substrate; a step of forming an organic pattern including a plurality of fillers condensed in the form of a network on the conductive layer; a step of dry etching the conductive layer by using the organic pattern as a mask and forming a conductive pattern wherein the shape of the fillers condensed in the form of the network is transferred; and a step of removing the organic pattern.