| 摘要 |
The present invention provides an apparatus for processing a flexible substrate and a method for processing a flexible substrate using the same to allow the flexible substrate to be processed in a roll-to-roll way in an independent space by separating a process area for transmission of the flexible substrate and processing of the flexible substrate. The apparatus for processing a flexible substrate comprises: a chamber having a plurality of process areas formed thereon; a substrate supply roll disposed inside the chamber to supply a flexible substrate to the plurality of process areas; a substrate recovery roll disposed inside the chamber to draw out the flexible substrate from the substrate supply roll and recover the flexible substrate; a rotational stage disposed inside the chamber, and supporting a curved surface of the flexible substrate between the substrate supply roll and the substrate recovery roll to rotate and transmit the flexible substrate; and electrodes disposed on the plurality of process areas, respectively, wherein plasma is generated on the plurality of process areas by RF power applied to the electrodes. Therefore, in accordance with the present invention, the apparatus for processing a flexible substrate and the method for processing a flexible substrate using the same are capable of improving productivity using the roll-to-roll way. |
