发明名称 METHOD OF MANUFACTURING FILM BY ELECTRO-SPRAY DEPOSITION METHOD
摘要 PROBLEM TO BE SOLVED: To safely and surely coat an organic material by lowering applied voltage as much as possible by an electro-spray deposition method when the organic material is coated.SOLUTION: Disclosed is a method of manufacturing an organic material film using an electro-spray deposition method, in which voltage is applied to at least a coating solution, and the coating solution applied by the voltage is sprayed as charged droplets. The method of manufacturing the organic material film is characterized in that the coating solution containing a halogen solvent, a polar solvent whose dielectric constant is 10 or more, and an aromatic solvent is used as the coating solution.
申请公布号 JP2015126116(A) 申请公布日期 2015.07.06
申请号 JP20130269751 申请日期 2013.12.26
申请人 MITSUBISHI CHEMICALS CORP 发明人 NAKAJIMA SATOSHI
分类号 H01L21/368;H01L21/336;H01L29/786;H01L51/05;H01L51/40;H01L51/42;H01L51/50;H05B33/10 主分类号 H01L21/368
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