| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ultrasonic sensor in which reliability is improved by efficiently drawing a wiring from elements arranged in an array shape.SOLUTION: An ultrasonic sensor includes a substrate 12 in which an opening 11 is formed, a vibration plate 13 which is provided on the substrate 12 so as to block the opening 11, and piezoelectric elements 17 which consist of a first electrode 14, a piezoelectric layer 15, and a second electrode 16 laminated on the side opposite to the opening 11 of the vibration plate 13, and are arrayed in a first direction and a second direction. The first electrode 14 is an electrode from which at least a part is removed between the piezoelectric elements 17. The second electrode 16 is an individual electrode formed for each piezoelectric element 17, and includes an insulation layer 20 which covers the second electrode 16 and has openings 21 for exposing parts on both sides in the first direction of the second electrode 16, and a conduction wiring 22 which is provided between the second electrodes 16 adjacent in the first direction and electrically connects the adjacent second electrodes 16 via the openings 21.</p> |
