| 摘要 |
<p>Provided is a stage capable of improving precision of temperature control. According to an embodiment of the present invention, the stage comprises a plate and a heat exchanger. The plate includes a surface side where a substrate is stacked thereon, and a back side. The heat exchanger supplies a heat exchange medium to a plurality of areas which are located on the back of the plate, are two-dimensionally distributed, and are not overlapped with each other and recovers the supplied heat exchange medium.</p> |
