SHAPE VARIABLE MIRROR AND LASER PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a shape variable mirror and a laser processing apparatus, which are insensitive to restrictions of adhesion to a reflector and can correct astigmatism.SOLUTION: The shape variable mirror comprises: a first pressing member for pressing two mutually opposing sites (Pxf) of a circumference of a reflection surface 1sf of a reflector 1; a second pressing member for pressing two mutually opposing sites (Pyb) of a circumference of a rear surface 1sb of the reflector 1; and a deformation volume adjustment part for locating the position around an axis of the second pressing member with respect to the first pressing member so that a position where the first pressing member presses the reflection surface 1sf and a position where the second pressing member presses the rear surface 1sb are different from each other around an axis passing through the centre of the reflection surface 1sf, and for changing a distance between the first pressing member and the second pressing member in an axial direction to adjust a deformation volume of the reflector 1 by pressing.