发明名称 直径が一定の区分を備えたシリコンから成る単結晶を引上げるための方法
摘要 <p>Single crystal composed of silicon with a section having a diameter that remains constant, are pulled by a method wherein the single crystal is pulled with a predefined pulling rate vp having the units [mm/min]; and the diameter of the single crystal in the section having a diameter that remains constant is regulated to the predefined diameter by regulating the heating power of a first heating source which supplies heat to the single crystal and to a region of the melt that adjoins the single crystal and is arranged above the melt, such that diameter fluctuations are corrected with a period duration T that is not longer than (2·18 mm)/vp.</p>
申请公布号 JP5743511(B2) 申请公布日期 2015.07.01
申请号 JP20100269535 申请日期 2010.12.02
申请人 发明人
分类号 C30B29/06;C30B15/26 主分类号 C30B29/06
代理机构 代理人
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