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发明名称
基板处理方法、程式、电脑记忆媒体及基板处理系统
摘要
在对相分离后之嵌段共聚物进行湿蚀刻而在基板上形成图案时,以抑制残留于晶圆上之液滴的方式,进行缺陷少的图案形成。使用包含亲水性聚合物与疏水性聚合物之嵌段共聚物来处理基板的方法,其特征系,在中性层上形成光阻图案,对光阻图案形成后的晶圆涂布嵌段共聚物。使嵌段共聚物相分离成亲水性聚合物与疏水性聚合物,接下来,对相分离之嵌段共聚物照射紫外线。然后,从溶剂喷嘴(130)将极性有机溶剂供给至晶圆(W),接下来,从第1气体喷嘴(140)对晶圆(W)吐出乾燥气体,而从晶圆(W)上排出极性有机溶剂。
申请公布号
TW201526075
申请公布日期
2015.07.01
申请号
TW103130406
申请日期
2014.09.03
申请人
东京威力科创股份有限公司 TOKYO ELECTRON LIMITED
发明人
山内刚 YAMAUCHI, TAKASHI;川上真一路 KAWAKAMI, SHINICHIRO;大河内厚 OOKOUCHI, ATSUSHI;一之宫博 ICHINOMIYA, HIROSHI;西畑広 NISIHATA, HIROSI;吉原孝介 YOSHIHARA, KOUSUKE
分类号
H01L21/027(2006.01);H01L21/306(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
林志刚
主权项
地址
日本 JP
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