发明名称 Optical product and method for manufacturing same
摘要 An optical product according to the present invention includes a transparent base material, and a multilayer film including a dielectric film and an ITO film. The multilayer film is formed on one face or two faces of the transparent base material. The physical thickness of the ITO film is not less than 3 nanometers and not greater than 7 nanometers. The ITO film can be formed by vapor deposition with plasma treatment.
申请公布号 US9069125(B2) 申请公布日期 2015.06.30
申请号 US201414333771 申请日期 2014.07.17
申请人 Tokai Optical Co., Ltd 发明人 Hirasawa Shinya;Takahashi Yoshinori;Kozaki Tetsuo;Kato Yuji
分类号 G02B1/11;C23C16/30;C23C16/40;C23C16/513;G02B1/116;B32B9/00;G02B1/10;G02B1/115;C03C17/34 主分类号 G02B1/11
代理机构 Burr & Brown, PLLC 代理人 Burr & Brown, PLLC
主权项 1. An optical product comprising: a transparent base material; and a multilayer film including a dielectric film and an ITO film, the multilayer film being formed on one face or two faces of the transparent base material; wherein the dielectric film on a surface side relative to the ITO film includes a ZrO2 film; wherein the ZrO2 film is arranged directly above and directly below the ITO film; and wherein a physical thickness of the ITO film is not less than 3 nanometers and not greater than 7 nanometers.
地址 Okazaki-Shi JP